Skolkovo Institute of Science and Technology
Micro- and Nanofabrication Cleanroom Shared Facility
In 2023-2024 a unique set of equipment for prototyping of devices based on photonic integrated circuits (PIC) has been launched at Skoltech Research Facilities Center – more than 30 pieces of equipment. A closed cycle for the creation of integrated optical devices is provided: crystal fabrication, assembly and measurements.
Goal: establish at Skoltech a center for prototyping of PIC-based devices –from telecommunications equipment and quantum key distribution systems to medical products, LIDARs, fiber-optic sensor systems and others.
Plans for 2024-2030: development of basic technology platforms, development of an assembly platform. Development of an electro-optical modulator for 20 GHz for optical transceivers, development of technology up to 40 GHz and higher. Development of solid-state LIDAR systems. Emerging applications.
key capabilities
results as of 2024
wafer diameter up to 150 mm
“Silicon-on-insulator”, “Silicon Nitride” and “Lithium Niobate” platforms
critical dimensions from 65 nm
active optical edge coupling and with diffraction elements
packaging
electro-optical characterization
process design kit (PDK) based on Russian-made software
planned production volume in MPW (multi-project wafer) format up to 600 10x10 mm chips per year
potential for technology transfer to experimental PIC production facilities being created in the Russian Federation
contacts
Skolkovo Institute of Science and Technology
The Territory of the Skolkovo Innovation Center
Russia, Moscow, 121205, Bolshoy Boulevard, 30, bld.1